期刊
CERAMICS INTERNATIONAL
卷 45, 期 17, 页码 22642-22648出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2019.07.297
关键词
HfO2; Dopant-free; Ferroelectricity; Switching dynamics; Synapse devices
资金
- National Research Foundation of Korea (NRF) - Korean government (MEST) (Nonvolatile Memory Transistors Using Binary Ferroelectric Metal Oxides Thin Films) [NRF-2017R1A2B4007492]
- Electronics and Telecommunications Research Institute (ETRI) - Korean Government (Development of Neuromorphic Hardware by Using High Performance Memristor Device based on Ultra-Thin Film Structure) [19ZB1800]
- Institute for Information & Communication Technology Planning & Evaluation (IITP), Republic of Korea [19ZB1800] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Metal-ferroelectric-metal capacitors were fabricated to evaluate the ferroelectricity and switching dynamics of the undoped-HfO2 thin films prepared by atomic layer deposition. The film thickness was controlled to be 9 to 16 nm as an important control parameter. The value of remnant polarization (P-r) decreased with increasing the film thickness owing to the modulations in amounts of ferroelectric orthorhombic phase. The 11-nm-thick HfO(2 )thin film, which was strategically suggested as a critical film thickness, showed the P-r value of 8.47 mu C/cm(2). Based on the accurately calculated P-r by double-pulse switching measurement and Kolmogorov-Avrami-Ishibashi (KAI) model, the ferroelectric polarization switching time (t(s)) and the activation electric field (BO for polarization reversal were estimated with the variations in film thickness of the HfO2 thin films. The t(s) and E-a showed decreasing and increasing trends with increasing the film thickness, respectively. The values of P-r for the MFN capacitor were also found to be gradually modulated by controlling the ferroelectric partial polarization with pulse-width and pulse-number modulations, which corresponded to the emulations of assigning the synaptic weights for the synapse device applications.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据