相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Film bulk acoustic resonators (FBARs) as biosensors: A review
Yi Zhang et al.
BIOSENSORS & BIOELECTRONICS (2018)
Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
Olaf Zywitzki et al.
SURFACE & COATINGS TECHNOLOGY (2017)
Excitation of hypersonic acoustic waves in diamond-based piezoelectric layered structure on the microwave frequencies up to 20 GHz
B. P. Sorokin et al.
ULTRASONICS (2017)
A review on coupled MEMS resonators for sensing applications utilizing mode localization
Chun Zhao et al.
SENSORS AND ACTUATORS A-PHYSICAL (2016)
Microwave bandpass filters based on thin-film acoustic resonators: theory and experiment
M. Yu. Dvoesherstov et al.
ACOUSTICAL PHYSICS (2015)
Study of microwave acoustic attenuation in a multifrequency bulk acoustic wave resonator based on a synthetic diamond single crystal
B. P. Sorokin et al.
ACOUSTICAL PHYSICS (2015)
Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure
B. P. Sorokin et al.
ACOUSTICAL PHYSICS (2015)
High-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy
D. Rabus et al.
JOURNAL OF APPLIED PHYSICS (2015)
A high-overtone bulk acoustic wave resonator-oscillator-based 4.596 GHz frequency source: Application to a coherent population trapping Cs vapor cell atomic clock
Thomas Daugey et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2015)
Thin film Lamb wave resonators in frequency control and sensing applications: a review
Ventsislav Yantchev et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2013)
Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
Milena Moreira et al.
VACUUM (2011)
AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications - A review
G. Wingqvist
SURFACE & COATINGS TECHNOLOGY (2010)
Equivalent circuit of a composite acoustic resonator for microwave radioelectronic devices
G. D. Mansfel'd et al.
ACOUSTICAL PHYSICS (2008)
Surface acoustic wave biosensors:: a review
Kerstin Laenge et al.
ANALYTICAL AND BIOANALYTICAL CHEMISTRY (2008)
Attenuation and trapping of acoustic energy in composite microwave resonators based on YAG single crystals
S. G. Alekseev et al.
ACOUSTICAL PHYSICS (2007)
High-tone bulk acoustic resonators on sapphire, crystal quartz, fused silica, and silicon substrates
Hao Zhang et al.
JOURNAL OF APPLIED PHYSICS (2006)
Thin film resonator technology
KM Lakin
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2005)
High textured AlN thin films grown by RF magnetron sputtering; composition, structure, morphology and hardness
IC Oliveira et al.
VACUUM (2004)
High-frequency, high-sensitivity acoustic sensor implemented on AlN/Si substrate
C Caliendo et al.
APPLIED PHYSICS LETTERS (2003)
Resonant spectrum method to characterize piezoelectric films in composite resonators
YX Zhang et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2003)