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Influence of substrate temperature on the crystalline quality of AlN layers deposited by RF reactive magnetron sputtering
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JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2014)
Graphene-based transparent strain sensor
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CARBON (2013)
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SENSORS AND ACTUATORS A-PHYSICAL (2013)
Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications
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SCIENTIFIC REPORTS (2013)
Film bulk acoustic resonator pressure sensor with self temperature reference
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JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2012)
Flexible piezoelectric cantilevers fabricated on polyimide substrate
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Acoustoelectric effects in reflection of leaky acoustic waves from LiTaO3 crystal surface coated with metal film
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APPLIED PHYSICS LETTERS (2011)
Development of SAW-based multi-gas sensor for simultaneous detection of CO2 and NO2
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Transportation and mixing of droplets by surface acoustic wave
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Synthesis of c-axis oriented AlN thin films on different substrates: A review
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Effect of substrate roughness on c-oriented AlN thin films
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Surface acoustic wave induced streaming and pumping in 128° Y-cut LiNbO3 for microfluidic applications
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Influence of ZnO buffer layer thickness on the electrical and optical properties of indium zinc oxide thin films deposited on PET substrates
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CERAMICS INTERNATIONAL (2008)
Optical sensing systems for microfluidic devices: A review
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ANALYTICA CHIMICA ACTA (2007)
A polymer-based flexible tactile sensor for both normal and shear load detections and its application for robotics
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Preparation of oriented aluminum nitride thin films on polyimide films and piezoelectric response with high thermal stability and flexibility
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Surface acoustic wave velocity in single-crystal AIN substrates
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IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2006)
Side-gate effects on transfer characteristics in GaN-based transversal filters
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APPLIED PHYSICS LETTERS (2005)
Microstructural evolution and formation of highly c-axis-oriented aluminum nitride films by reactively magnetron sputtering deposition
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JOURNAL OF CRYSTAL GROWTH (2005)
Planar chip device for PCR and hybridization with surface acoustic wave pump
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LAB ON A CHIP (2005)
Piezoelectric characterization of individual zinc oxide nanobelt probed by piezoresponse force microscope
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Thickness dependence of the properties of highly c-axis textured AlN thin films
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2004)
Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0001) structure
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Structural, optical, and acoustic characterization of high-quality AlN thick films sputtered on Al2O3(0001) at low temperature for GHz-band electroacoustic devices applications
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JOURNAL OF APPLIED PHYSICS (2004)
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Piezoelectric coefficient measurements in ferroelectric single crystals using high voltage atomic force microscopy
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Chemical vapour deposition of polycrystalline AlN films from AlCl3-NH3 mixtures: II - surface morphology and mechanisms of preferential orientation at low-pressure
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Quantitative ferroelectric characterization of single submicron grains in Bi-layered perovskite thin films
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