期刊
OPTICS LETTERS
卷 44, 期 11, 页码 2835-2838出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.44.002835
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资金
- National Natural Science Foundation of China (NSFC) [61735006]
- Laboratory Research Fund from Wuhan National Laboratory for Optoelectronics [2018WNLOKF001]
- China Postdoctoral Science Foundation [2018M640692]
- Qingba Program of Beihang University [KG12089701]
The chip-scale terahertz (THz) devices and systems are helpful to enable actual applications in THz communication and sensing. Here, we demonstrate an on-chip THz whispering gallery mode resonator (WGMR) delivering a high-quality (Q) factor TE single mode, fabricated on a high-resistivity float zone silicon wafer by complementary metal-oxide-semiconductor compatible technology. For a TE mode in a WGMR, it is the first time to achieve a Q factor of 1210 at 0.4925 THz with 28 dB extinction ratio, to the best of our knowledge. With this excellent WGMR, we have demonstrated a stable and highly sensitive sensor for particle distance estimation. Our investigation provides an effective approach to fabricate high-performance integrated THz-WGMRs for chip-scale systems. (C) 2019 Optical Society of America
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