期刊
NANO RESEARCH
卷 12, 期 8, 页码 1796-1803出版社
TSINGHUA UNIV PRESS
DOI: 10.1007/s12274-019-2434-4
关键词
InGaZnO; nanowires; thin-film transistors; superlattice
类别
资金
- National Natural Science Foundation of China [51672229]
- Research Grants Council of Hong Kong SAR, China [T42-103/16-N]
- Science Technology and Innovation Committee of Shenzhen Municipality [JCYJ20170818095520778]
- Shenzhen Research Institute, City University of Hong Kong
- [CityU 11211317]
Amorphous indium-gallium-zinc oxide (a-IGZO) materials have been widely explored for various thin-film transistor (TFT) applications; however, their device performance is still restricted by the intrinsic material issues especially due to their non-crystalline nature. In this study, highly crystalline superlattice-structured IGZO nanowires (NWs) with different Ga concentration are successfully fabricated by enhanced ambient-pressure chemical vapor deposition (CVD). The unique superlattice structure together with the optimal Ga concentration (i.e., 31 at.%) are found to effectively modulate the carrier concentration as well as efficiently suppress the oxygen vacancy formation for the superior NW device performance. In specific, the In1.8Ga1.8Zn24O7 NW field-effect transistor exhibit impressive device characteristics with the average electron mobility of similar to 110 cm(2)center dot V-1 center dot s(-1) and on/off current ratio of similar to 10(6). Importantly, these NWs can also be integrated into NW parallel arrays for the construction of high-performance TFT devices, in which their performance is comparable to many state-of-the-art IGZO TFTs. All these results can evidently indicate the promising potential of these crystalline superlattice-structured IGZO NWs for the practical utilization in next-generation metal-oxide TFT device technologies.
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