期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 28, 期 2, 页码 271-278出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2019.2899266
关键词
Aluminum nitride; supersonic; hypersonic; microelectromechanical systems; piezoelectric transducers
类别
资金
- Air Force Office of Scientific Research [FA9550-16-C-0036]
A microelectromechanical-system piezoelectric pressure sensor targeting hypersonic flow applications is presented. The sensing diaphragms have 500-mu m diameter and are comprised of a composite stack of Si, SiO2, and AlN. This paper presents the fabrication and packaging details of the sensor and then presents test results from a Mach-6 hypersonic-flow facility, in which the prototype sensor data are compared against data from a mature commercial sensor present in the same tests. Salient hypersonic-flow features are observed in signals captured by the prototype. The package is comprised of an on-chip two-element array with 650-mu m pitch, and signals from the elements captured during hypersonic-flow tests are highly correlated.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据