期刊
JOURNAL OF CRYSTAL GROWTH
卷 512, 期 -, 页码 37-40出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2019.02.008
关键词
Adsorption; Molecular beam epitaxy; Phosphide; Semiconducting III-V materials
资金
- Research Foundation for the Electrotechnology of Chubu [R-29217]
In this work Ga adatom incorporation diffusion length was quantified in two different directions, < 1 1 0 > and <1<(1)over bar>0>, during MBE growth of a GaP layer. Thickness distribution was measured for the GaP layer grown on striped patterned GaP substrate and the data was analyzed based on a one-dimensional diffusion growth model between two different adjacent facets. It was quantitatively revealed that the diffusion length of the Ga adatoms increased with growth temperature and an anisotropy in the diffusion length was observed along <110> and <1<(1)over bar>0> directions. The influence in the morphology due to the diffusion length anisotropy was discussed with the RHEED patterns.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据