期刊
JOURNAL OF ALLOYS AND COMPOUNDS
卷 798, 期 -, 页码 467-477出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2019.05.227
关键词
Au/ZnO thin films; RF-Magnetron sputtering; Hydrogen gas sensor; Sensing response and recovery
资金
- NSFC [61775149]
- Shenzhen Science and Technology Project [JCYJ20160226192754225, JCYJ20160307145209361, JCYJ20160307111047701]
- Guangdong Natural Science Foundation [2016A030313059]
- Science and Technology plan project of Guangdong [2017A010101018]
In this paper, using RF magnetron sputtering, we first demonstrate a UV-light enhanced high sensitive hydrogen sensor based on spherical Au nanoparticles on ZnO nano-structured thin films. The response of the sensor is highly dependent on UV light illumination. In the sensor, nano-structured thin films of Au/ZnO have been synthesized by RF magnetron sputtering on pre-interdigitated alumina substrates. The spherical Au nanoparticles have been successfully formed on the surface of the ZnO film by varying/controlling the post-annealing temperature (600 degrees C) and environment (N-2). The thin films have been systematically characterized by XRD, SEM, Raman, and XPS. As revealed by the Hydrogen gas sensing results, the N-2 post-annealed Au/ZnO thin film sensor has remarkably enhanced the sensing performance under UV light illumination of about 172% at 1000 ppm of H-2 concentration-two, times higher than when it was without UV light (80%). The gas sensor under UV light lowers the gas detection limit to 50 ppm from 100 ppm (without UV light). We discuss the detailed mechanism of the gas sensor under dark and UV light with the help of different theoretical models such as spillover and band bending mechanism. (C) 2019 Elsevier B.V. All rights reserved.
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