期刊
IEEE SENSORS JOURNAL
卷 19, 期 9, 页码 3415-3424出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2019.2891784
关键词
CMOS MEMS flow sensor; instrumentation amplifiers; readout integrated circuit; Wheatstone bridge
资金
- NPRP through the Qatar National Research Fund (a member of the Qatar Foundation) [NPRP9-421-2-170]
- Australian Research Council [DP130104374]
- Guangzhou STI Commission [201704030101]
- Guangdong Science and Technology [2017B050506001]
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N-2 gas flow. Our SoC features a very low-noise instrumentation amplifier that is implemented on a CMOS wafer and serves as a readout integrated circuit for a thermoresistive micro-calorimetric flow sensor which is fabricated on a MEMS wafer. A compact heterogeneous integration is achieved by combining the two wafers via the proprietary InvenSense AIN process. The measured sensitivity of our CMOS MEMS flow sensor is 98 mV/scam which is three times better than the state-of-the-art counterpart. The flow range measured by our SoC is from -26 to 26 m/s (from -50 to 50 sccm). Moreover, the pulsed heater operation makes this proposed SoC flow sensor a very low power (<9 mW) and, thus, a promising candidate for the Internet-of-Things applications in smart home/green buildings.
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