期刊
APPLIED PHYSICS EXPRESS
卷 12, 期 5, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.7567/1882-0786/ab176b
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资金
- Canon Foundation
- JSPS Core-to-Core Program, A. Advanced Research Networks
- A3 Foresight Program
- JSPS KAKENHI, Japan [JP16H04343]
The key to achieving high-quality van der Waals heterostructure devices made by stacking 2D layered materials lies in having a clean interface without interfacial bubbles and wrinkles. In this study, the pinpoint pick-up and transfer system of 2D crystals is constructed using polymers with lens shapes. We report the bubble-free and clean interface assembly of 2D crystals in which unidirectional sweep of the transfer interface precisely controlled with the help of the inclined substrate pushes the bubbles away from the interface. (C) 2019 The Japan Society of Applied Physics
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