期刊
RESULTS IN PHYSICS
卷 12, 期 -, 页码 1574-1585出版社
ELSEVIER
DOI: 10.1016/j.rinp.2019.01.054
关键词
Titanium oxidation; Raman spectroscopy; Surface roughness parameters; Raman intensity; Microwave plasma; Raman mapping
资金
- SFI [16/RC/3872]
- EU FP7 under the European Research Council Starting Grant programme [ERC-SG-335508]
This study evaluates the use of a combination of Raman spectroscopy and optical profilometry as a surface characterisation technique for the examination of oxide layers grown on titanium metal substrates. The titanium oxide layers with thickness of up to 8 mu m, were obtained using a low-pressure oxygen microwave plasma treatment of the titanium metal substrate. The effect of the microwave plasma processing conditions (input power, pressure and treatment time) on the Raman bandwidth, intensity and peak position was evaluated. Also, the effect of these processing conditions on the surface roughness parameters (S-a, S-dq, S-sk and S-ku) of the oxide layers was investigated. Analysis of the peak positions of E-g and A(1g) modes indicated that the effects of input power and chamber pressure was to induce a shift towards the lower frequency with increasing input power and pressure (1-2 kPa). The intensity of the Raman bands was found to be dependent on the morphology and surface chemistry of the oxide layer. The intensity of Raman band (A(1g)), was found to be particularly influenced by the average surface roughness (S-a) and the crystallite size. Exponential and polynomial relations were found to correlate with these properties. A two-latent variable Partial Least Squares Regression model developed on Raman spectral data could predict surface roughness with a coefficient of determination (R-2) of approx. 0.87 when applied to the testing of an independent set of titanium oxide test coatings.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据