相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Terahertz Metamaterial Absorbers Implemented in CMOS Technology for Imaging Applications: Scaling to Large Format Focal Plane Arrays
Ivonne Escorcia Carranza et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2017)
Enhancement in CMOS-MEMS Resonator for High Sensitive Temperature Sensing
Hasan Goktas et al.
IEEE SENSORS JOURNAL (2017)
Attogram mass sensing based on silicon microbeam resonators
In-Bok Baek et al.
SCIENTIFIC REPORTS (2017)
The implementation of low-power and wide tuning range MEMS filters for communication applications
H. Goktas et al.
RADIO SCIENCE (2016)
Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing
Yu Hui et al.
NATURE COMMUNICATIONS (2016)
Tuning In-Plane Fixed-Fixed Beam Resonators With Embedded Heater in CMOS Technology
Hasan Goektas et al.
IEEE ELECTRON DEVICE LETTERS (2015)
CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration
Fredrik Forsberg et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2015)
Uncooled Infrared Detectors Using Gallium Nitride on Silicon Micromechanical Resonators
Vikrant J. Gokhale et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2014)
Single-crystal diamond nanomechanical resonators with quality factors exceeding one million
Y. Tao et al.
NATURE COMMUNICATIONS (2014)
Fast and high resolution thermal detector based on an aluminum nitride piezoelectric microelectromechanical resonator with an integrated suspended heat absorbing element
Yu Hui et al.
APPLIED PHYSICS LETTERS (2013)
Nanomechanical Torsional Resonators for Frequency-Shift Infrared Thermal Sensing
X. C. Zhang et al.
NANO LETTERS (2013)
Detecting single infrared photons with 93% system efficiency
F. Marsili et al.
NATURE PHOTONICS (2013)
Ultrasensitive string-based temperature sensors
T. Larsen et al.
APPLIED PHYSICS LETTERS (2011)
A low-cost 128x128 uncooled infrared detector array in CMOS process
Selim Eminoglu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)
An atomic-resolution nanomechanical mass sensor
K. Jensen et al.
NATURE NANOTECHNOLOGY (2008)
Zeptogram-scale nanomechanical mass sensing
YT Yang et al.
NANO LETTERS (2006)
Influencing factors on the pyroelectric properties of Pb(Zr,Ti)O3 thin film for uncooled infrared detector
DH Kang et al.
MATERIALS CHEMISTRY AND PHYSICS (2005)
Characterizations of VO2-based uncooled microbolometer linear array
CH Chen et al.
SENSORS AND ACTUATORS A-PHYSICAL (2001)
分享论文
