期刊
MATERIALS
卷 12, 期 6, 页码 -出版社
MDPI
DOI: 10.3390/ma12060877
关键词
metal oxide thin films; gas sensors; volatile organic compound detection; microwave frequency
类别
资金
- National Science Center, Poland [2016/23/D/ST7/00481]
Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 degrees C) and 50% relative humidity (RH) under exposure to 0-200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO2-based gas sensors, while for methanol detection both dioxides, SnO2 and TiO2, exhibited good sensitivity.
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