期刊
THIN SOLID FILMS
卷 678, 期 -, 页码 8-15出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2019.03.036
关键词
Cubic silicon carbide; Laser chemical vapor deposition; Epitaxial growth; Hydrogen dilution gas; Microtwins
类别
资金
- Science Challenge Project [TZ2016001]
- National Natural Science Foundation of China [11602251, 51372188, 51861145306, 51872212]
- 111 Project [B13035]
- Joint Fund of Ministry of Education for Preresearch of Equipment [201922JJ02]
- International Science & Technology Cooperation Program of China [2014DFA53090]
- Natural Science Foundation of Hubei Province, China [2016CFA006]
- Fundamental Research Funds for the Central Universities [WUT: 2017YB004, 2019III030, 2019III031]
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (WUT) [2019-KF-12]
Epitaxial 3C-SiC films were fabricated on Si(001) by laser chemical vapor deposition using hexamethyldisilane as the precursor source and H-2 as the dilution gas. The effect of the H-2 flow rate on the density of microtwins in 3C-SiC films was investigated. Crystallographic defects were mainly composed of {111} twins, which tilted 15.8 degrees to the surface of the substrate and refer to the multiple twins mirrored by the first-order twins; these defects were characterized by pole figure. With the flow rate of H-2 increased from 1.0 to 3.0 slm (standard liter per minute), the relative twin density first decreased from 24.0 to 1.2 and then increased to 16.0. The mechanism of the formation and elimination of the defects is also discussed.
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