期刊
OPTICAL ENGINEERING
卷 58, 期 1, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.58.1.013107
关键词
fly-cutting; microgroove; micropyramid arrays
类别
资金
- project of Xi'an Science and Technology Board [201805031YD9CG15(2)]
- International Science and Technology Innovation Cooperation between Governments Project of National Key Research and Development Program [2016YFE0111900]
- Equipment Development Department of People's Republic of China Central Military Commission [41423060201]
- Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test [ZSKJ201702]
- Xi'an Key Laboratory of Intelligent Detection and Perception [201805061ZD12CG45]
Microgroove cutting by fly-cutting is studied to obtain the optimized parameters to get a smooth groove with less burr and chip. We analyzed the reason for the second groove and reduced the cutting times to fade the effect of machine reposition error. Introducing additional empty cut further reduced the burr and chip. To get the ideal micropyramid arrays, all factors must be considered and controlled. Finally, processed pyramid arrays with the depth of 1 mu m whose structure distributed the entire surface evenly and with no obvious chip. (C) 2019 Society of Photo-Optical Instrumentation Engineers (SPIE)
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