Effects of van der Waals force on nonlinear vibration of electromechanical integrated electrostatic harmonic actuator

An electromechanical integrated electrostatic harmonic actuator is promising for the miniaturization of electromechanical devices. As the dimensions of the actuator decrease, the effects of the van der Waals force become obvious. In this study, by considering the nonlinearity of electrostatic and van der Waals forces, nonlinear vibration equations of the flexible ring of an electrostatic harmonic actuator are deduced. Using these equations, the nonlinear free vibration and nonlinear forced response of the actuator are investigated. The effects of the van der Waals force on the nonlinear vibration of the flexible ring are analyzed. Results show that these effects of the van der Waals force are relatively obvious under some conditions and should be considered.