Laser printer patterned sacrificed layer for arbitrary design and scalable fabrication of the all-solid-state interdigitated in-planar hydrous ruthenium oxide flexible micro supercapacitors

We demonstrate the successful fabrication of all-solid-state flexible micro-supercapacitors (mu SCs) on commercial polyethylene terephthalate (PET) sheet using a commercial laser printer. The interdigitated in-planar electrodes of the mu SC are fabricated by commercial toner cartridge and their self-aligned stacking configurations are made by depositing Pt thin films and hydrous ruthenium oxide (RuO center dot xH(2)O, hRuO(2)) layers on the PET sheets using a post-low-temperature annealing process. The mu SC cells can be combined in parallel or series by an arbitrary printing process operated on a personal computer, thereby avoiding unnecessary external connections and improving the capacitive behavior. The fabricated hRuO(2)-based mu SCs exhibit excellent electrochemical-energy storage, along with ultrahigh volumetric power density (73460 mW cm(-3)) and energy density (24.9 mWh cm(-3)). This facile and simplified strategy constructs mu SCs with tailored self-aligned electrodes of arbitrary design, excellent mechanical stability, and high flexibility. Therefore, it offers a high-productivity, low-cost, photolithography-free microfabrication of mu SCs for microscale supercapacitor applications.