期刊
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
卷 67, 期 3, 页码 915-921出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMTT.2018.2890661
关键词
Bulk acoustic wave (BAW); filter; Lamb wave; plate wave; resonator; surface acoustic wave (SAW)
This paper investigates the applicability of acoustic wave devices using an interdigital transducer placed on a thin piezoelectric crystal plate to the 3-5-GHz range, where significant performance degradation was expected in surface acoustic wave (SAW) devices. Three types of the SAW-like devices were fabricated by using a KrF stepper/scanner, and their performances are compared from various aspects: 1) a 3.5-GHz resonator using a rotated Y-cut LiTaO3 plate attached on a Si substrate; 2) a 5-GHz resonator using a X-cut LiNbO3 plate on a Si substrate; and 3) a 5.4-GHz A(1) Lamb mode resonator on a free-standing Z-cut LiNbO3 plate. It is revealed that these devices offer excellent performances even in the 3-5-GHz range.
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