期刊
COATINGS
卷 8, 期 11, 页码 -出版社
MDPI
DOI: 10.3390/coatings8110412
关键词
gas impulse magnetron sputtering; thin films; TiO2; microstructure; surface properties; optical properties; mechanical properties; hardness; scratch resistance
In this this paper, a comparison of TiO2 thin films prepared by magnetron sputtering with a continuous and pulsed gas flow was presented. Structural, surface, optical, and mechanical properties of deposited titanium dioxide coatings were analyzed with the use of a wide range of measurement techniques. It was found that thin films deposited with a gas impulse had a nanocrystalline rutile structure instead of fibrous-like anatase obtained with a continuous gas flow. TiO2 thin films deposited with both techniques were transparent in the visible wavelength range, however, a much higher refractive index and packing density were observed for coatings deposited by the pulsed gas technique. The application of a gas impulse improved the hardness and scratch resistance of the prepared TiO2 thin films.
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