期刊
COATINGS
卷 8, 期 10, 页码 -出版社
MDPI
DOI: 10.3390/coatings8100360
关键词
subwavelength structures; anti-reflection coatings; finite-difference time-domain; nanostructure fabrication
资金
- National Natural Science Foundation of China [51505078, 61705018]
- 111 Project of China [D17017]
Reflection loss on the optical component surface is detrimental to performance. Several researchers have discovered that the eyes of moths are covered with micro- and nanostructured films that reduce broadband and wide-angle light reflection. This research proposes a new type of moth-eye subwavelength structure with a waist, which is equivalent to a gradient refractive index film layer with high-low-high hyperbolic-type fill factor distribution. The diffraction order characteristics of a moth-eye subwavelength structure are first analyzed using a rigorous coupled wave analysis. The moth-eye structural parameters are optimized within the spectral range of 2-5 mu m using the finite-difference time-domain method. The experimental fabrication of the moth-eye structure with a waist array upon a silicon substrate is demonstrated by using three-beam laser interferometric lithography and an inductively coupled plasma process. The experimental and simulation results show good agreement. The experimental results show that the reflectivity of the moth-eye structure with a waist is less than 1.3% when the incidence angle is less than 30 degrees, and less than 4% when the incidence angle is less than 60 degrees. This research can guide the development of AR broadband optical components and wide-angle applications.
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