期刊
ACS PHOTONICS
卷 6, 期 2, 页码 351-359出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.8b00769
关键词
amorphous Ga2O3; flexible; X-ray detectors; oxygen vacancy; persistent photocurrent
类别
资金
- National Natural Science Foundation of China [11675280, 11674405, 61306011, 11274366, 51272280, 61874139]
Ga2O3, as an emerging optoelectronic material, is very appealing for the detection of ionizing radiation because of its low cost, wide band gap (4.5-5.0 eV) and radiation hardness. In this work, a flexible X-ray detector using amorphous Ga2O3 (a-Ga2O3) thin film is demonstrated. The a-Ga2O3 thin film was deposited on polyethylene naphthalate (PEN) substrate with delicately control of the oxygen flux during the radio frequency (RF) magnetron sputtering process. Metal/semiconductor/metal-structured photodetectors with coplanar interdigital electrodes were fabricated on this a-Ga2O3 film. Temporal response measurements under X-ray illumination indicate that a larger photocurrent occurs on the film deposited with smaller oxygen flux. A model combined with theoretical calculation is proposed to explain the enhancement of the X-ray photoresponsivity, which involves the slowing down of the annihilation rate caused by the neutralization of more ionized oxygen vacancy (V-0) states. No significant degradation of the device performance under UV and X-ray radiation is observed after the flexibility test. This finding informs a novel way to design the flexible X-ray and other ionizing radiation detectors based on amorphous oxide materials.
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