Improving the sensitivity of X-ray microanalysis in the analytical electron microscope

A study of the influence of experimental parameters on the sensitivity of x-ray energy dispersive spectroscopy in the analytical electron microscope from 20-200 kV is conducted. Optimization of conditions in the next generation of aberration corrected AEM instrument coupled with an array configuration of SDD detectors can potentially yield a 10-20 fold improvement over older Si(Li) systems still in use today.