期刊
SENSORS
卷 18, 期 10, 页码 -出版社
MDPI
DOI: 10.3390/s18103519
关键词
silicon photonics; evanescent optical field sensor; label-free SOI biosensor; Mach-Zehnder interferometer; ring resonator; photonic crystal; Bragg grating; sub-wavelength grating; lab-on-a-chip; microfluidics
资金
- CMC Microsystems
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- MITACS Accelerate program
- NSERC CREATE Silicon Electronic Photonic Integrated Circuits (SiEPIC) research training program
- China Scholarship Council (CSC)
Thanks to advanced semiconductor microfabrication technology, chip-scale integration and miniaturization of lab-on-a-chip components, silicon-based optical biosensors have made significant progress for the purpose of point-of-care diagnosis. In this review, we provide an overview of the state-of-the-art in evanescent field biosensing technologies including interferometer, microcavity, photonic crystal, and Bragg grating waveguide-based sensors. Their sensing mechanisms and sensor performances, as well as real biomarkers for label-free detection, are exhibited and compared. We also review the development of chip-level integration for lab-on-a-chip photonic sensing platforms, which consist of the optical sensing device, flow delivery system, optical input and readout equipment. At last, some advanced system-level complementary metal-oxide semiconductor (CMOS) chip packaging examples are presented, indicating the commercialization potential for the low cost, high yield, portable biosensing platform leveraging CMOS processes.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据