Ultrasonic vibration-assisted microgrinding of glassy carbon

Glassy carbon is an amorphous material which, due to its unique material properties, has recently been introduced to micro/nanoimprinting as mold substrates. However, since glassy carbon is a hard, brittle, and highly elastic material, the precision machining of micro/nanostructures on it remains a challenging task. In this research, ultrasonic vibration-assisted microgrinding was proposed for ductile machining of glassy carbon. To find suitable conditions, the effects of ultrasonic vibration assistance and tool inclination were investigated. The results showed that by utilizing ultrasonic vibration assistance and tool inclination, a ductile response was achieved with improved surface roughness. In addition, the periodical waviness of the groove edge due to material elastic recovery was successfully prevented. This study provided an insight into the kinematics in ultrasonic vibration-assisted grinding of a highly elastic, hard, and brittle material.