期刊
OPTICS EXPRESS
卷 26, 期 22, 页码 28178-28186出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.26.028178
关键词
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类别
资金
- National Natural Science Foundation of China (NSFC) [61505120, 61425007, 61635007]
- Natural Science Foundation of Guangdong Province [2017A010102015, 2015B010105007, 2014A030308007]
- Shenzhen Science and Technology Innovation Commission [JCYJ20170412105604705, JCYJ20170302143105991, JCYJ20160427104925452]
- Shenzhen University [2017019]
- Development and Reform Commission of Shenzhen Municipality Foundation
We demonstrate a novel design and fabrication process for fiber-tip Fabry-Perot interferometric (FTFPI) pressure sensors which eliminates fringe envelopes in the reflection spectrum. The outer facet reflectivity and thickness of the FTFPI silica diaphragm were reduced through orthogonal rough-polishing of the fiber end facet. A silica FTFPI sample with a diaphragm thickness of similar to 10.7 mu m was produced and tested under hydraulic pressures ranging from 0 to 30 MPa. The proposed sensor achieved a pressure sensitivity of -284 pm/MPa at 1555 mu and could be a valuable new tool for high pressure measurements. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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