期刊
ACS NANO
卷 10, 期 12, 页码 10851-10857出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsnano.6b05004
关键词
screen-printing technique; laser multiscanning lift-off process; freestanding and flexible thermoelectric power generator
类别
资金
- National Research Foundation of Korea (NRF) - Korean Government (MSIP) [NRF-2015R1A5A1036133]
Flexible thermoelectric generators (f-TEGs) are emerging as a semipermanent power source for self-powered sensors, which is an important area of research for next-generation smart network monitoring systems in the Internet-of-things era. We report in this paper a f-TEG produced by a screen printing technique (SPT) and a laser multiscanning (LMS) lift-off process. A screen-printed TEG was fabricated on a SiO2/a-Si/quartz substrate via the SPT process, and the LMS process completely separated the rigid quartz substrate from the original TEG by selective reaction of the XeCl excimer laser with the exfoliation layer (a-Si). Using these techniques, we fabricate a prototype f-TEG composed of an array of 72 TE couples that exhibits high flexibility at various bending radii, together with excellent output performance (4.78 mW/cm(2) and 20.8 mW/g at Delta T = 25 degrees C). There is no significant change in the device performance even under repeated bending of 8000 cycles.
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