期刊
ACS APPLIED MATERIALS & INTERFACES
卷 8, 期 26, 页码 16869-16875出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.6b04526
关键词
conformal graphene; grating structured quartz substrates; direct CVD growth; pressure-sensitive sensor; wind pressure
资金
- National Natural Science Foundation of China (NSFC) [11404329, 61504148, 61306079, 51402291]
- National High-tech R&D Program of China (863 Program) [2015AA034801]
- Natural Science Foundation Project of CQ CSTC [CSTC2014jcyjjq50004]
- CAS
Conformal graphene films have directly been synthesized on the surface of grating microstructured quartz substrates by a simple chemical vapor deposition process. The wonderful conformality and relatively high quality of the as prepared graphene on the three-dimensional substrate have been verified by scanning electron microscopy and Raman spectra. This conformal graphene film possesses excellent electrical and optical properties with a sheet resistance of <2000 Omega.sq(-1) and a transmittance of >80% (at 550 nm), which can be attached with a flat graphene film on a poly(dimethylsiloxane) substrate, and then could work as a pressure-sensitive sensor. This device possesses a high-pressure sensitivity of -6.524 kPa(-1) in a low-pressure range of 0-200 Pa. Meanwhile, this pressure-sensitive sensor exhibits super-reliability (>= 5000 cycles) and an ultrafast response time (<= 4 ms). Owing to these features, this pressure-sensitive sensor based on 3D conformal graphene is adequately introduced to test wind pressure, expressing higher accuracy and a lower background noise level than a market anemometer.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据