期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 89, 期 -, 页码 116-120出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2018.09.008
关键词
V2O5; VO2; Aerosol Spray Pyrolysis; Gas sensor; Thermochromic material
类别
资金
- Hellenic Ministry of Education with the acronym EXOTHERMO [09SYN-32-1185]
- European funding programs under the FP7 Regpot 2013 [316165]
- NSF [1358137]
- Office Of Internatl Science &Engineering
- Office Of The Director [1358137] Funding Source: National Science Foundation
Vanadium oxide (VxOy) nanostructured films were prepared by Aerosol Spray Pyrolysis technique with different concentrations of precursor solution (0.005 M, 0.01 M, 0.02 M), using ammonium metavanadate (NH4VO3) as precursor. The deposition was carried out onto glass substrates (Corning glass) at two different substrate temperatures (300 degrees C and 400 degrees C). Furthermore, oxalic acid was added to the precursor solution in order to grow the thermochromic VO2(M) monoclinic phase via reduction of the Vanadium oxides in which Vanadium is in a higher oxidizing state. All films were characterized by X-Ray Diffraction technique and UV/Vis/NIR spectroscopy to identify their structural and optical properties, respectively. V2O5 films were tested against ozone, having a sensitivity of 29% in ultra-low concentration of 5ppb ozone, at room temperature. Moreover, nanostructured VO2 films appeared to be thermochromic, having an IR-switching of about 5% at lambda = 2500 nm, upon heating.
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