期刊
ACS APPLIED MATERIALS & INTERFACES
卷 8, 期 4, 页码 2774-2780出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b11075
关键词
manganese sulfide; atomic layer deposition; thin film batteries; metal sulfide ALD; ALD for batteries; MnS battery anode; gamma-MnS; alpha-MnS
资金
- U.S. Department of Energy, Office of Science, Office of Workforce Development for Teachers and Scientists (WDTS) under the Visiting Faculty Program (VFP)
- Argonne-Northwestern Solar Energy Research (ANSER) Center, an Energy Frontier Research Center - U.S. Department of Energy (DOE), Office of Science, Basic Energy Sciences (BES) [DE-SC0001059]
- Center for Electrochemical Energy Science, an Energy Frontier Research Center - U.S. Department of Energy (DOE), Office of Science, Office of Basic Energy Sciences (BES)
- Center for Electrochemical Energy Science
- Argonne National Laboratory, a U.S. Department of Energy Office of Science Laboratory by UChicago Argonne, LLC. [DE-AC02-06CH11357]
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-06CH11357]
Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures <= 150 degrees C phase-pure gamma-MnS thin films were deposited, while at temperatures >150 degrees C, a mixed phase consisting of both gamma- and alpha-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS), allow the derivation of a self-consistent reaction mechanism. Finally, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near theoretical capacity.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据
分享论文
