期刊
MACROMOLECULAR MATERIALS AND ENGINEERING
卷 303, 期 12, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/mame.201800296
关键词
carbon micropatterns; lithography; photoresist; transparent electric heaters
资金
- Korea Institute of Energy Technology Evaluation and Planning (KETEP) - Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea [20164010201070]
- National Research Foundation of Korea (NRF) - Ministry of Science and ICT (MSIT) [2015M2A2A6A01043822]
In this study, transparent electric heaters (TEHs) are developed based on photoresist-derived carbon micropatterns (CMs). Well-defined SU-8 micropatterns formed by deep UV lithography are carbonized in a tube furnace under an inert atmosphere. The resulting CMs are found to have pseudo-graphitic structures containing both graphitic and disordered structures. The optical transmittance and electrical conductivity of the CMs increase as their thickness increases. The 102 nm thick CMs exhibit a good transmittance of 78% at 550 nm and a high electrical conductivity of 2.51 x 10(2) S cm(-1). As TEHs, the 102 nm thick CMs demonstrate a maximum temperature of 116 degrees C with a maximum heating rate of 8.78 degrees C s(-1) at an applied voltage of 60 V and a low electricity consumption of 1.02 W cm(-2), which are comparable to the electric heating performance of TEHs prepared with carbon nanomaterials. Therefore, the CMs fabricated in this study can be utilized as electrodes for TEHs in various medical, industrial, consumer, and automobile applications.
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