期刊
APPLIED PHYSICS EXPRESS
卷 11, 期 12, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.7567/APEX.11.126501
关键词
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资金
- Institute for Information & communications Technology Promotion (IITP) - Korea government (MSIT) [2017-0-00048]
- Public Safety Promotion Technology Development Project - Ministry of Trade, Industry and Energy (MOTIE) of Korea [10065658]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10065658] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We demonstrate a new process scheme for fabricating stretchable active matrices of oxide thin-film transistors (TFTs), where TFTs and cross points of two metal layers on stiff islands are monolithically integrated with gallium-based liquid metal interconnects within an elastomeric matrix. As the liquid metal interconnects are formed by a photolithography-based technique compatible with conventional flexible circuit technology, this approach can provide high integration density and mechanical durability as required in stretchable displays or electronic skins. We have fabricated a 4 x 4 active matrix of oxide TFTs within a 20 x 20 mm(2) area, which provides stable operation up to 40% of stretching. (C) 2018 The Japan Society of Applied Physics
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