Erbium-doped chalcogenide glass thin film on silicon using femtosecond pulsed laser with different deposition temperatures

The properties of Er3+-doped gallium lanthanum sulphide thin films prepared on a silicon substrate by femtosecond pulsed laser deposition were studied as a function of process temperature. The films were characterised using transition electron microscopy imaging, X-ray diffractometry, Raman spectroscopy, fluorescence spectroscopy, and UV-Vis-NIR spectroscopy. The results show that by increasing the substrate temperature, the deposited layer thickness increases and the crystallinity of the films changes. The room temperature photoluminescence and lifetimes of the (I13/2I15/2)-I-4-I-4 transition of Er3+ are reported in the paper.