期刊
ADVANCED FUNCTIONAL MATERIALS
卷 29, 期 2, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adfm.201806786
关键词
electronic skin; laser direct writing; strain sensors
类别
资金
- National Key Research and Development Program of China [2018YFB1105400]
- National Natural Science Foundation of China [51705154, 61804054]
- Shanghai Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning, Shanghai Rising-Star Program [18QA1401300]
- Shanghai Sailing Program [17YF1403300]
Electronic skins (e-skins) have been widely investigated as important platforms for healthcare monitoring, human/machine interfaces, and soft robots. However, mask-free formation of patterned active materials on elastomer substrates without involving high-cost and complicate processes is still a grand challenge in developing e-skins. Here, SiC-based strain sensor arrays are fabricated on elastomer for e-skins by a laser direct writing (LDW) technique, which is mask-free, highly efficient, and scalable. The direct synthesis of active material on elastomer is ascribed to the LDW-induced conversion of siloxanes to SiC. The SiC-based devices own a highest sensitivity of approximate to 2.47 x 10(5) achieved at a laser power of 0.8 W and a scanning velocity of 1.25 mm s(-1). Moreover, the LDW-developed device provides a minimum strain detection limit of 0.05%, a small temperature drift, and a high mechanical durability for over 10 000 cycles. When it is mounted onto human skins, the SiC-based device is able to monitor external stimuli and human health conditions, with the capability of wireless data transmission. Its potential application in e-skins is further proved by an LDW-fabricated device having 3 x 3 SiC sensor array for tactile sensing.
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