期刊
ACS APPLIED MATERIALS & INTERFACES
卷 11, 期 4, 页码 4500-4506出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.8b15091
关键词
FIB; ToF-SIMS; argon cluster; milling; polymer; hybrid interfaces; additive manufacturing
资金
- 3DMetChemIT project of the EMPIR programme
- European Union's Horizon 2020 research and innovation programme
- EPSRC Award, Enabling Next Generation Additive Manufacturing [EP/P031684/1]
- EPSRC [EP/P031684/1] Funding Source: UKRI
Organic inorganic hybrid materials enable the design and fabrication of new materials with enhanced properties. The interface between the organic and inorganic materials is often critical to the device's performance; therefore, chemical characterization is of significant interest. Because the interfaces are often buried, milling by focused ion beams (FIBs) to expose the interface is becoming increasingly popular. Chemical imaging can subsequently be obtained using secondary-ion mass spectrometry (SIMS). However, the FIB milling process damages the organic material. In this study, we make an organic inorganic test structure to develop a detailed understanding of the processes involved in FIB milling and SIMS imaging. We provide an analysis methodology that involves a clean-up process using sputtering with an argon gas cluster ion source to remove the FIB-induced damage. The methodology is evaluated for two additive manufactured devices, an encapsulated strain sensor containing silver tracks embedded in a polymeric material and a copper track on a flexible polymeric substrate created using a novel nanoparticle sintering technique.
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