Development of material measures for performance verifying surface topography measuring instruments

The development of two irregular-geometry material measures for performance verifying surface topography measuring instruments is described. The material measures are designed to be used to performance verify tactile and optical areal surface topography measuring instruments. The manufacture of the material measures using diamond turning followed by nickel electroforming is described in detail. Measurement results are then obtained using a traceable stylus instrument and a commercial coherence scanning interferometer, and the results are shown to agree to within the measurement uncertainties. The material measures are now commercially available as part of a suite of material measures aimed at the calibration and performance verification of areal surface topography measuring instruments.