期刊
PHOTONICS RESEARCH
卷 6, 期 9, 页码 925-928出版社
OPTICAL SOC AMER
DOI: 10.1364/PRJ.6.000925
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资金
- Konica Minolta Imaging Science Encouragement Award
- Ministry of Education, Culture, Sports, Science and Technology (MEXT)
- Japan Society for the Promotion of Science (JSPS) [JP26220605, JP18K13798]
- New Energy and Industrial Technology Development Organization (NEDO)
- Burroughs Wellcome Foundation
Mid-infrared (MIR) integrated photonics has attracted broad interest due to its promising applications in biochemical sensing, environmental monitoring, disease diagnosis, and optical communication. Among MIR integration platforms, germanium-based platforms hold many excellent properties, such as wide transparency windows, high refractive indices, and high nonlinear coefficients; however, the development of MIR germanium photonic devices is still in its infancy. Specifically, MIR high-Q germanium resonators with comparable performance to their silicon counterparts remain unprecedented. Here we experimentally demonstrate an MIR germanium nanocavity with a Q factor of similar to 18,000, the highest-to-date of reported nanocavities across MIR germanium-based integration platforms. This is achieved through a combination of a feasible theoretical design, Smart-Cut methods for wafer development, and optimized device fabrication processes. Our nanocavity, with its high Q factor and ultrasmall mode volume, opens new avenues for on-chip applications in the MIR spectral range. (C) 2018 Chinese Laser Press
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