Tuning cationic composition of La: EuTiO3-δ films

Eu1-xLaxTiO3-delta (x = 0, 0.3, 0.5) films were deposited in a p(Ar(96%)/H-2(4%)) = 4x10(-4) mbar atmosphere on (LaAlO3)(0.3)-(Sr2AlTaO6)(0.7) vicinal substrates (0.1 degrees). Reflection high-energy electron diffraction oscillation characteristics of a layer-by-layer growth mode were observed for stoichiometric and Ti-rich films and the laser fluence suited to deposit stoichiometric films was identified to be 1.25 J/cm(2) independent of the La content. The variety of resulting film compositions follows the general trend of Eu-enrichment for low laser and Ti-enrichment for high laser fluence. X-ray diffraction confirms that all the films are compressively strained with a general trend of an increase of c-axis elongation for non-stoichiometric films. The surfaces of non-stoichiometric films have an increased roughness, the highest sheet resistances, exhibit the presence of islands, and are Eu3+ rich for films deposited at low laser fluence. (C) 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.