UV-Assisted Low Temperature Oxide Dielectric Films for TFT Applications

ADVANCED MATERIALS INTERFACES

WILEY

1. National Research Foundation of Korea [NRF-2012R1A1A2003620]
2. Ministry of Trade, Industry & Energy of Korea [10041808]
3. Korea Evaluation Institute of Industrial Technology (KEIT) [10041808] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)