期刊
NANOSCALE RESEARCH LETTERS
卷 9, 期 -, 页码 -出版社
SPRINGER
DOI: 10.1186/1556-276X-9-105
关键词
Titanium nitride; Nanostructure; Oblique angle deposition technique; Hydrogen peroxide; Sensor
资金
- National Natural Science Foundation of China [51372135, 51228101]
- National Basic Research Program of China (973 program) [2013CB934301]
- Research Project of Chinese Ministry of Education [113007A]
- Tsinghua University Initiative Scientific Research Program
Nanostructured titanium nitride (TiN) films with varying porosity were prepared by the oblique angle deposition technique (OAD). The porosity of films increases as the deposition angle becomes larger. The film obtained at an incident angle of 85A degrees exhibits the best catalytic activity and sensitivity to hydrogen peroxide (H2O2). This could be attributed to its largest contact area with the electrolyte. An effective approach is thus proposed to fabricate TiN nanostructure as H2O2 sensor by OAD.
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