期刊
NANOSCALE RESEARCH LETTERS
卷 8, 期 -, 页码 -出版社
SPRINGER
DOI: 10.1186/1556-276X-8-75
关键词
Scanning probe lithography; Nanocrystalline graphite; Dry etching mask
资金
- Italian Institute of Technology (IIT)
A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6 plasma, to produce Si nanofeatured molds.
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