期刊
NANO ENERGY
卷 53, 期 -, 页码 198-205出版社
ELSEVIER
DOI: 10.1016/j.nanoen.2018.08.053
关键词
Acoustic sensor; Self-powered; Multi-channel; High sensitivity; Tunable resonance frequency
类别
资金
- Wearable Platform Materials Technology Center (WMC) [NRF-2016R1A5A1009926]
- Center for Integrated Smart Sensors - Ministry of Science and ICT as Global Frontier Project [CISS-2016M3A6A6929958]
- Creative Materials Discovery Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT and Future Planning [NRF-2016M3D1A1900035]
Herein, we report a self-powered flexible piezoelectric acoustic sensor (f-PAS) inspired by basilar membrane in human cochlear. The f-PAS covered the voice frequency spectrum via the combination of its low quality (Q) factor and multi-resonant frequency tuning, exhibiting four to eight times higher sensitivity than the conventional condenser sensor. Our piezoelectric acoustic sensor with a thin membrane design produced sufficient output voltages by the distinct resonant movement of the Pb[Zr0.52Ti0.48]O-3 (PZT) membrane under the minute acoustic sound stimuli. Multiple sensor channels were integrated in a single f-PAS chip with a size of 1.5 x 3 cm(2), which acquire multi-tunable piezoelectric signals without any external power. A linear response of the resonance frequency of the curved piezoelectric membrane was theoretically investigated by a finite element method (FEM) calculation. Low Q factors from corresponding channels were achieved by optimal membrane thickness and channel length.
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