期刊
MICROMACHINES
卷 4, 期 2, 页码 232-242出版社
MDPI
DOI: 10.3390/mi4020232
关键词
nanopillar; lithography; microrobot; surface-directed liquid flow; microfluidic chip
类别
资金
- Ministry of Education, Culture, Sports, Science and Technology [23106002]
- Japan Society for the Promotion of Science
- Grants-in-Aid for Scientific Research [12J10106] Funding Source: KAKEN
This paper presents a novel method for fabricating nanopillar micropatterns for surface-directed liquid flows. It employs hybrid mask lithography, which uses a mask consisting of a combination of a photoresist and nanoparticles in the photolithography process. The nanopillar density is controlled by varying the weight ratio of nanoparticles in the composite mask. Hybrid mask lithography was used to fabricate a surface-directed liquid flow. The effect of the surface-directed liquid flow, which was formed by the air-liquid interface due to nanopillar micropatterns, was evaluated, and the results show that the oscillation of microparticles, when the micro-tool was actuated, was dramatically reduced by using a surface-directed liquid flow. Moreover, the target particle was manipulated individually without non-oscillating ambient particles.
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