Tunable multiband terahertz metamaterials using a reconfigurable electric split-ring resonator array

We demonstrate micromachined reconfigurable metamaterials working at multiple frequencies simultaneously in the terahertz range. The proposed metamaterial structures can be structurally reconfigured by employing flexible microelectromechanical system-based cantilevers in the resonators, which are designed to deform out of plane under an external stimulus. The proposed metamaterial structures provide not only multiband resonance frequency operation but also polarization-dependent tunability. Three kinds of metamaterials are investigated as electric split-ring resonator (eSRR) arrays with different positions of the split. By moving the position of the split away from the resonator's center, the eSRR exhibits anisotropy, with the dipole resonance splitting into two resonances. The dipole-dipole coupling strength can be continuously adjusted, which enables the electromagnetic response to be tailored by adjusting the direct current (DC) voltage between the released cantilevers and the silicon substrate. The observed tunability of the eSRRs is found to be dependent on the polarization of the incident terahertz wave. This polarization-dependent tunability is demonstrated by both experimental measurements and electromagnetic simulations.