期刊
LIGHT-SCIENCE & APPLICATIONS
卷 1, 期 -, 页码 -出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/lsa.2012.6
关键词
femtosecond laser direct writing; femtosecond laser multiphoton ablation; micro-/nanofabrication; two-photon polymerization
类别
资金
- National Science Foundation [CMMI 0900419, 0758199]
- National Natural Science Foundation of China [90923039]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [0758199] Funding Source: National Science Foundation
- EPSCoR [1004094] Funding Source: National Science Foundation
- Office Of The Director [1004094] Funding Source: National Science Foundation
Modern three-dimensional nanofabrication requires both additive and subtractive processes. However, both processes are largely isolated and generally regarded as incompatible with each other. In this study, we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond (fs) laser multiphoton ablation. To demonstrate the new capability, submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mu m diameter were successfully fabricated. This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures, promising for a wide range of applications in integrated optics, microfluidics and microelectromechanical systems.
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