期刊
LIGHT-SCIENCE & APPLICATIONS
卷 1, 期 -, 页码 -出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/lsa.2012.16
关键词
microelectromechanical systems; optical switch; silicon photonics
类别
资金
- Strategic Information and Communication R&D Promotion Program of Japanese Government
- Grants-in-Aid for Scientific Research [21226009] Funding Source: KAKEN
Silicon photonic devices consisting of nanowire waveguides are a promising technology for on-chip integration in future optical telecommunication and interconnection systems based on silicon-large scale integration fabrication. However, the accommodation of variable optical components on a chip remains challenging due to the small size of microchips. In this study, we investigated the characteristics of a microelectromechanical silicon nanowire waveguide switch with a gap-variable coupler. Due to its capacitive operation, the proposed waveguide switch consumed negligible power relative to switches that use a thermo-optical effect and carrier injection. The proposed switch was characterized using analyses based on coupled-mode theory for rectangular waveguides, as well as a simulation using the finite difference time domain method. A 2x2 single switch with an improved configuration and a 2x6 multiple switch composed of the 2x2 switches was designed and fabricated by a combination of electron beam lithography, fast-atom beam etching and hydrofluoric acid vapor sacrificial etching. The properties of the switches were measured and evaluated at a wavelength of 1.55 mu m.
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