期刊
JOURNAL OF MATERIALS CHEMISTRY C
卷 1, 期 7, 页码 1392-1398出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/c2tc00148a
关键词
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资金
- MICINN [TEC2010-10804-E, CTQ2009-14565-C03-03, TEC2008-06574-C03-03]
- Moncloa Campus of International Excellence (CEI)
A non-chemically amplified negative-tone electron-beam resist with an extremely high sensitivity is presented in this work. The resist, poly(2-hydroxyethyl methacrylate-co-2-methacrylamidoethyl methacrylate) (P(HEMA-co-MAAEMA)), has been synthesized using free radical polymerization of 2-hydroxyethyl methacrylate and 2-aminoethyl methacrylate, and exhibits a crosslinking threshold dose as low as 0.5 mu C cm(-2). Exposed resist patterns show good adherence to silicon substrates without the assistance of adhesion promoters or thermal treatments and are shown to be adequate for use as a mask for both wet and dry etching of Si. A low contrast value of 1.2 has been measured, indicating that the synthesized polymeric mixture is particularly suitable for achieving grey (3D) lithography. Other relevant properties of the new e-beam resist are optical transparency, visible photoluminescence when crosslinked at low electronic doses, and dose-dependent dual-tone behaviour.
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