4.6 Article

Emerging trends in metal-containing block copolymers: synthesis, self-assembly, and nanomanufacturing applications

期刊

JOURNAL OF MATERIALS CHEMISTRY C
卷 1, 期 11, 页码 2080-2091

出版社

ROYAL SOC CHEMISTRY
DOI: 10.1039/c3tc00930k

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  1. Scientific User Facilities Division, Office of Basic Energy Sciences, U.S. Department of Energy
  2. World Premier International Research Center Initiative (WPI Initiative), MEXT, Japan
  3. Core Research for Evolutional Science and Technology (CREST) program of Japan Science and Technology Agency (JST), Japan
  4. Center for Nanoscale Materials, a U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences User Facility [DE-AC02-06CH11357]

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Block copolymers with metals confined in one or more blocks are emerging as candidate materials for nanomanufacturing applications due to their unprecedented nanoscale pattern transfer capabilities. In this article we highlight recent developments in metal-containing block copolymers in terms of their novel synthetic methodologies with particular emphasis on sequential infiltration synthesis, their hierarchical self-assembly from nano, meso, and submicron scales, and their applications as an etch mask for high-throughput, high-aspect-ratio nano and meso scale patterning.

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