High-resolution on-chip supercapacitors with ultra-high scan rate ability

A simple approach for the fabrication of high-resolution on-chip supercapacitors with increased performances is demonstrated. The resulting micro-devices display high specific cell capacitance (3 mF cm(-2) using a hydrous rutheniumoxide electrode) and impressive scan rate abilities, up to 10 000 V s(-1) for multi-walled carbon nanotube basedmicro-supercapacitors, which is five orders of magnitude higher than those of conventional supercapacitors.