期刊
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY
卷 3, 期 5, 页码 515-523出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TTHZ.2013.2270300
关键词
Lens; leaky wave antennas; silicon fabrication; terahertz (THz)
资金
- Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA
- National Aeronautics and Space Administration
- Spanish CICYT [AYA2010-10054-E, TEC2007-66698-C04-01, TEC2010-20841-C04-02]
- program Ramon y Cajal [RYC-2009-04924]
- CONSOLIDER [CSD2008-68]
In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna arrays with a parallel process. To show the concept, a first antenna prototype has been fabricated using this fabrication process. Measurements obtained at 550 GHz are presented.
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