THz Metrology and Instrumentation

This paper gives an overview of measurement techniques used in the THz region of the electromagnetic spectrum, from about 100 GHz to several THz. Currently available components necessary for THz metrology, such as sources, detectors and passives, are briefly described. A discussion of power measurements, vector network analysis and antenna measurements as well as the limitations of these measurements at THz frequencies is given. The paper concludes with a summary of available components and instrumentation for THz metrology at the time of writing.